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Click below for detailed party information:

Inventors

Roger James Schutz Mark Phillip Wright

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LAM RESEARCH CORORATION

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SCHUTZ, ROGER JAMES, Assignor WRIGHT, MARK PHILLIP, Assignor

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ARC SUPPRESSION PLATE FOR A PLASMA PROCESSING CHAMBER

11/434,971 | U.S. Patent Application

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Filed May 15, 2006

Examiner Ram N Kackar

Class 156

Art Group 1716

Patent No. 7,763,147

Case Type Utility

Status Patented Case

Last Updated: 5 days, 2 hours ago

Date	#	Transaction
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ARC SUPPRESSION PLATE FOR A PLASMA PROCESSING CHAMBER

11/434,971 | U.S. Patent Application

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