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Shrikant Lohokare

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LAM RESEARCH CORPORATION

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ACCURATE TEMPERATURE MEASUREMENT FOR SEMICONDUCTOR APPLICATIONS

11/97,063 | U.S. Patent Application

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Location ELECTRONIC

Filed April 1, 2005

Examiner GAIL KAPLAN VERBITSKY

Class 374

Art Group 2855

Patent No. 7,380,982

Case Type Utility - 374/137000

Status Patented Case

Child PCT/US06/09879 Published

Last Updated: 5 years, 8 months ago

Date	#	Transaction
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ACCURATE TEMPERATURE MEASUREMENT FOR SEMICONDUCTOR APPLICATIONS

11/97,063 | U.S. Patent Application

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