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METHOD AND APPARATUS FOR PREVENTING ALD REACTANTS FROM DAMAGING VACUUM PUMPS

11/136,610 | U.S. Patent Application

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Location ELECTRONIC
Filed May 23, 2005
Examiner SATISH CHANDRA
Class 156
Art Group 1716
Patent No. 8,679,287
Case Type Utility - 156/345290
Status Patented Case
Child PCT/US06/19888 Published
Last Updated: 6 years, 5 months ago
Date # Transaction