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MEMS DEVICE HAVING A DRIVE COIL WITH CURVED SEGMENTS

11/796,277 | U.S. Patent Application

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Location ELECTRONIC
Filed April 26, 2007
Examiner EUNCHA P CHERRY
Class 359
Art Group 2872
Patent No. 7,616,366
Case Type Utility - 359/224100
Status Patented Case
Last Updated: 6 years, 6 months ago
Date # Transaction