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CADENCE DESIGN SYSTEMS, INC.

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Srini Doddi Junjiang Lei Kuang-Hao Lay Weiping Fang

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INTERPOLATION OF IRREGULAR DATA IN A FINITE-DIMENSIONAL METRIC SPACE IN LITHOGRAPHIC SIMULATION

11/966,920 | U.S. Patent Application

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Location ELECTRONIC

Filed Dec. 28, 2007

Examiner ALEX KOK SOON LIEW

Class 382

Art Group 2668

Patent No. 8,358,828

Case Type Utility - 382/141000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 2 years, 3 months ago

Date	#	Transaction
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INTERPOLATION OF IRREGULAR DATA IN A FINITE-DIMENSIONAL METRIC SPACE IN LITHOGRAPHIC SIMULATION

11/966,920 | U.S. Patent Application

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