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Daniel A. Babbs Byung-Jin Choi Anshuman Cherala

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Chucking System for Nano-Manufacturing

12/860,490 | U.S. Patent Application

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Location ELECTRONIC

Filed Aug. 20, 2010

Examiner EMMANUEL S LUK

Class 425

Art Group 1744

Case Type Utility - 425/385000

Status Abandoned -- Failure to Respond to an Office Action

Parent 11/47,428 Patented

Last Updated: 3 years, 10 months ago

Date	#	Transaction
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Chucking System for Nano-Manufacturing

12/860,490 | U.S. Patent Application

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