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FEMTOSECOND LASER-INDUCED FORMATION OF SUBMICROMETER SPIKES ON A SEMICONDUCTOR SUBSTRATE

13/21,409 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 4, 2011
Examiner STEPHEN A KITT
Class 438
Art Group 1717
Patent No. 8,598,051
Case Type Utility - 438/795000
Status Patented Case
Parent 12/235,086 Patented
Parent 11/196,929 Patented
Parent 10/950,230 Patented
Parent 10/155,429 Patented
Parent 60/293,590 Expired
Parent 10/950,248 Patented
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Last Updated: 2 years, 2 months ago
Date # Transaction