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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER

13/448,769 | U.S. Patent Application

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Filed April 17, 2012
Examiner PETERSON, ERIK T
Class 438
Art Group 2822
Patent No. 8,778,806
Case Type Utility
Status Patented Case
Last Updated: 4 months, 1 week ago
Date # Transaction