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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer

13/767,459 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 14, 2013
Examiner ERIK T PETERSON
Class 438
Art Group 2822
Patent No. 8,946,058
Case Type Utility - 438/464000
Status Patented Case
Parent 13/412,119 Patented
Parent 61/452,450 Expired
Child 14/854,127 Patented
Child 13/787,032 Patented
Child 13/787,153 Patented
Child PCT/US14/16074 Published
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Last Updated: 3 years, 1 month ago
Date # Transaction