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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer

13/787,153 | U.S. Patent Application

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Location ELECTRONIC
Filed March 6, 2013
Examiner ERIK T PETERSON
Class 438
Art Group 2822
Patent No. 9,105,705
Case Type Utility - 438/460000
Status Patented Case
Parent 13/787,032 Patented
Parent 13/767,459 Patented
Parent 13/412,119 Patented
Parent 13/412,119 Patented
Parent 61/452,450 Expired
Child 14/729,610 Patented
Last Updated: 1 year, 3 months ago
Date # Transaction