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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

14/227,349 | U.S. Patent Application

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Location ELECTRONIC
Filed March 27, 2014
Examiner COLLIN X BEATTY
Class 355
Art Group 2872
Patent No. 10,156,792
Case Type Utility - 355/067000
Status Patented Case
Parent 12/379,415 Patented
Parent 11/882,208 Abandoned
Parent 11/266,288 Patented
Parent PCT/JP2004/006417 -
Parent 60/721,582 Expired
Child 16/16,515 Pending
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Last Updated: 6 years, 2 months ago
Date # Transaction