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President & Fellows of Harvard College

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NATIONAL SCIENCE FOUNDATION

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Eric Mazur Mengyan Shen PRESIDENT AND FELLOWS OF HARVARD COLLEGE, Assignor

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Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Semiconductor Substrate

14/73,460 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 6, 2013

Examiner STEPHEN A KITT

Class 438

Art Group 1717

Patent No. 9,136,146

Case Type Utility - 438/795000

Status Patented Case

Parent 13/21,409 Patented

Parent 12/235,086 Patented

Parent 11/196,929 Patented

Parent 10/950,230 Patented

Parent 10/950,248 Patented

Child 14/836,609 Patented

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Last Updated: 2 years, 5 months ago

Date	#	Transaction
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Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Semiconductor Substrate

14/73,460 | U.S. Patent Application

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