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Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Semiconductor Substrate

14/73,460 | U.S. Patent Application

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Location ELECTRONIC
Filed Nov. 6, 2013
Examiner STEPHEN A KITT
Class 438
Art Group 1717
Patent No. 9,136,146
Case Type Utility - 438/795000
Status Patented Case
Parent 13/21,409 Patented
Parent 12/235,086 Patented
Parent 11/196,929 Patented
Parent 10/950,230 Patented
Parent 10/950,248 Patented
Child 14/836,609 Patented
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Last Updated: 4 years, 2 months ago
Date # Transaction