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ATOMIC LAYER OR CYCLIC PLASMA ETCHING CHEMISTRIES AND PROCESSES

14/730,917 | U.S. Patent Application

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Location ELECTRONIC
Filed June 4, 2015
Examiner ALLAN W OLSEN
Class 216
Art Group 1716
Patent No. 9,773,683
Case Type Utility - 216/067000
Status Patented Case
Parent 62/9,484 Expired
Last Updated: 6 years, 2 months ago
Date # Transaction