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Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Semiconductor Substrate

14/836,609 | U.S. Patent Application

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Location ELECTRONIC
Filed Aug. 26, 2015
Examiner MARIANNE L PADGETT
Class 427
Art Group 1717
Patent No. 10,361,083
Case Type Utility - 427/532000
Status Patented Case
Parent 14/73,460 Patented
Parent 13/21,409 Patented
Parent 12/235,086 Patented
Parent 11/196,929 Patented
Parent 10/950,230 Patented
Parent 10/950,248 Patented
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Last Updated: 5 years, 9 months ago
Date # Transaction