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Inventors

Linnell Martinez David Pays-Volard Chris Johnson David Johnson Russell Westerman Gordon M. Grivna

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Plasma-Therm LLC

Assignee

PLASMA-THERM LLC

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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer

14/842,365 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 1, 2015

Examiner ERIK T PETERSON

Class 438

Art Group 2822

Patent No. 10,297,427

Case Type Utility - 438/464000

Status Patented Case

Parent 13/764,177 Patented

Parent 13/412,119 Patented

Parent 61/452,450 Expired

Child 14/974,840 Patented

Child 16/132,040 Pending

Last Updated: 4 years, 6 months ago

Date	#	Transaction
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer

14/842,365 | U.S. Patent Application

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