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FEMTOSECOND LASER-INDUCED FORMATION OF SUBMICROMETER SPIKES ON A SEMICONDUCTOR SUBSTRATE

15/896,940 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 14, 2018
Examiner ISMAIL A MUSE
Class 257
Art Group 2819
Patent No. 10,741,399
Case Type Utility - 257/618000
Status Patented Case
Parent 14/836,609 Patented
Parent 14/73,460 Patented
Parent 13/21,409 Patented
Parent 12/235,086 Patented
Parent 11/196,929 Patented
Parent 10/950,230 Patented
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Last Updated: 3 years, 2 months ago
Date # Transaction