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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

16/16,515 | U.S. Patent Application

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Location ELECTRONIC
Filed June 22, 2018
Examiner COLLIN X BEATTY
Class 355
Art Group 2872
Case Type Utility - 355/067000
Status Abandoned -- Failure to Respond to an Office Action
Parent 14/227,349 Patented
Parent 12/379,415 Patented
Parent 11/882,208 Abandoned
Parent 11/266,288 Patented
Parent 60/721,582 Expired
Parent PCT/JP2004/006417 -
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Last Updated: 4 years, 7 months ago
Date # Transaction