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GUANGDONG UNIVERSITY OF TECHNOLOGY

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GUANGDONG UNIVERSITY OF TECHNOLOGY

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Jian GAO Yun CHEN Xin CHEN Lanyu ZHANG Junlang LIANG Yunbo HE + see more - see less

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XY MACRO-MICRO MOTION STAGE AND CONTROL METHOD THEREOF BASED ON END FEEDBACK

17/581,245 | U.S. Patent Application

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Location ELECTRONIC

Filed Jan. 21, 2022

Examiner GEORGE B BENNETT

Class 073

Art Group 2855

Patent No. 11,365,960

Case Type Utility - 073/328000

Status Patented Case

Child 202110239657.3

Last Updated: 1 month, 4 weeks ago

Date	#	Transaction
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XY MACRO-MICRO MOTION STAGE AND CONTROL METHOD THEREOF BASED ON END FEEDBACK

17/581,245 | U.S. Patent Application

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