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Inventors

Kun Liu Gregory A. Schwind Alan S. Bahm

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FEI Company

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FEI COMPANY

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BAHM, ALAN S., Assignor SCHWIND, GREGORY A., Assignor LIU, KUN, Assignor

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MECHANICALLY-STABLE ELECTRON SOURCE

17/654,759 | U.S. Patent Application

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Filed March 14, 2022

Examiner Hsien C Tsai

Class 250

Art Group 2881

Patent No. 11,749,492

Case Type Utility

Status Patented Case

Last Updated: 2 days, 11 hours ago

Date	#	Transaction
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MECHANICALLY-STABLE ELECTRON SOURCE

17/654,759 | U.S. Patent Application

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