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Inventors

Kousuke Fukuchi Ryoji Asakura Soichiro Eto Tsubasa Okamoto Tatehito Usui Shigeru Nakamoto

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Hitachi High-Tech Corporation

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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

17/878,176 | U.S. Patent Application

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Filed Aug. 1, 2022

Examiner Binh X Tran

Class 438

Art Group 1713

Patent No. 12,131,964

Case Type Utility

Status Patented Case

Last Updated: 1 week ago

Date	#	Transaction
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

17/878,176 | U.S. Patent Application

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