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Click below for detailed party information:

Inventor

Takehiro TANIKAWA

Applicant

Tokyo Electron Limited

Assignee

TOKYO ELECTRON LIMITED

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TANIKAWA, TAKEHIRO, Assignor

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DEPOSITION METHOD AND PROCESSING APPARATUS

18/178,801 | U.S. Patent Application

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Filed March 6, 2023

Examiner Dharti Haridas Patel

Class 361

Art Group 2836

Patent No. 12,230,483

Case Type Utility

Status Patented Case

Last Updated: 5 days, 12 hours ago

Date	#	Transaction
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DEPOSITION METHOD AND PROCESSING APPARATUS

18/178,801 | U.S. Patent Application

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