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THOMAS J. HARTSWICK CARTER W. KAANTA PEI-ING P. LEE TERRANCE M. WRIGHT

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INTERNATIONAL BUSINESS MACHINES CORPORATION

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PROCESS FOR FORMING REFRACTORY METAL SILICIDE LAYERS OF DIFFERENT THICKNESSES IN AN INTEGRATED CIRCUIT

07/567,992 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Aug. 16, 1990

Examiner TUAN N QUACH

Class 999

Art Group 1104

Patent No. 5,034,348

Case Type Utility - 999/200000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 4 years, 11 months ago

Date	#	Transaction
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PROCESS FOR FORMING REFRACTORY METAL SILICIDE LAYERS OF DIFFERENT THICKNESSES IN AN INTEGRATED CIRCUIT

07/567,992 | U.S. Patent Application

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