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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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RANN S. YEH CHAO-HSIN CHANG HSIEN-WEN CHANG

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METHOD FOR REDUCING PRECIPITATE DEFECTS USING A PLASMA TREATMENT POST BPSG ETCHBACK

08/789,718 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Jan. 27, 1997

Examiner LUZ L ALEJANDRO MULERO

Class 438

Art Group 1763

Patent No. 5,783,493

Case Type Utility - 438/718000

Status Patented Case

Last Updated: 2 years, 4 months ago

Date	#	Transaction
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METHOD FOR REDUCING PRECIPITATE DEFECTS USING A PLASMA TREATMENT POST BPSG ETCHBACK

08/789,718 | U.S. Patent Application

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