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MULTI-TEMPERATURE PLASMA ETCHING PROCESS

60/58,650 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Sept. 11, 1997
Status Provisional Application Expired
Child 09/151,163 Patented
Child 10/439,245 Patented
Child 09/798,787 Abandoned
Child 12/29,469 Abandoned
Last Updated: 3 years, 6 months ago
Date # Transaction