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DANEIL L. FLAMM

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MULTI-TEMPERATURE PLASMA ETCHING PROCESS

60/58,650 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Sept. 11, 1997

Status Provisional Application Expired

Child 09/151,163 Patented

Child 10/439,245 Patented

Child 09/798,787 Abandoned

Child 12/29,469 Abandoned

Last Updated: 5 years, 3 months ago

Date	#	Transaction
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60/58,650 | U.S. Patent Application

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