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ZIRCONIUM AND/OR HAFNIUM SILICON-OXYNITRIDE GATE DIELECTRIC

09/115,859 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 15, 1998
Examiner BERNARD E SOUW
Class 438
Art Group 2814
Patent No. 6,020,243
Case Type Utility - 438/287000
Status Patented Case
Parent 60/53,616 Expired
Parent 60/53,617 Expired
Child 09/434,205 Patented
Last Updated: 4 years, 9 months ago
Date # Transaction