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Roman Chistyakov Bassam Hanna Abraham

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Methods of Generating an Arc-Free Discharge for Reactive Sputtering

61/297,263 | U.S. Patent Application

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Location ELECTRONIC

Filed Jan. 21, 2010

Case Type Provisional

Status Provisional Application Expired

Child 13/10,762 Patented

Child 14/270,440 Abandoned

Child 15/791,110 Pending

Last Updated: 5 years, 10 months ago

Date	#	Transaction
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Methods of Generating an Arc-Free Discharge for Reactive Sputtering

61/297,263 | U.S. Patent Application

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