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PLASMA-THERM LLC

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Chris W. Johnson David J. Johnson Russell Westerman

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Apparatus for Plasma Dicing a Semi-conductor Wafer

61/452,450 | U.S. Patent Application

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Location ELECTRONIC

Filed March 14, 2011

Case Type Provisional

Status Provisional Application Expired

Child 13/412,119 Patented

Child PCT/US12/28771 Published

Child 13/448,769 Patented

Child 13/764,110 Patented

Child 13/764,142 Patented

Child 13/767,459 Patented

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Last Updated: 2 years, 4 months ago

Date	#	Transaction
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Apparatus for Plasma Dicing a Semi-conductor Wafer

61/452,450 | U.S. Patent Application

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