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NOVELLUS SYSTEMS, INC.

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Zhian He

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METHOD AND APPARATUS FOR DYNAMIC CURRENT DISTRIBUTION CONTROL DURING ELECTROPLATING

61/730,285 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 27, 2012

Case Type Provisional

Status Provisional Application Expired

Child 14/67,616 Patented

Child 15/873,660 Abandoned

Last Updated: 5 months, 4 weeks ago

Date	#	Transaction
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METHOD AND APPARATUS FOR DYNAMIC CURRENT DISTRIBUTION CONTROL DURING ELECTROPLATING

61/730,285 | U.S. Patent Application

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