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METHOD AND DEVICE FOR PRODUCTION OF COMPONENTS FOR MICROFABRICATION

09/191,784 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 13, 1998
Examiner ALVA C POWELL
Class 156
Art Group 1763
Patent No. 6,187,214
Case Type Utility - 156/345000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/192,091 Patented
Child 09/676,024 Patented
Last Updated: 8 months ago
Date # Transaction