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Rahul GUPTA Venkateswara R. PALLEM Benjamin J. JURCIK, JR.

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ATOMIC LAYER OR CYCLIC PLASMA ETCHING CHEMISTRIES AND PROCESSES

62/9,484 | U.S. Patent Application

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Location ELECTRONIC

Filed June 9, 2014

Case Type Provisional

Status Provisional Application Expired

Child 14/730,917 Patented

Last Updated: 3 years, 6 months ago

Date	#	Transaction
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ATOMIC LAYER OR CYCLIC PLASMA ETCHING CHEMISTRIES AND PROCESSES

62/9,484 | U.S. Patent Application

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