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Inventors

Benno Orschel Andrey Melnikov John Valley Markus Siegert

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SunEdison Semiconductor Limited (UEN201334164H)

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SUNEDISON SEMICONDUCTOR LIMITED (UEN201334164H)

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ORSCHEL, BENNO, Assignor VALLEY, JOHN F., Assignor MELNIKOV, ANDREY, Assignor SIEGERT, MARKUS JAN PETER, Assignor

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SYSTEMS AND METHODS FOR PERFORMING PHASE SHIFT INTERFEROMETRY WHILE A WAFER IS VIBRATING

62/91,170 | U.S. Patent Application

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Filed Dec. 12, 2014

Case Type Provisional

Status Provisional Application Expired

Child PCTUS1565359 RO PROCESSING COMPLETED

Child 15/534,550 Patented Case

Last Updated: 4 months, 3 weeks ago

Date	#	Transaction
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SYSTEMS AND METHODS FOR PERFORMING PHASE SHIFT INTERFEROMETRY WHILE A WAFER IS VIBRATING

62/91,170 | U.S. Patent Application

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