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RENESAS ELECTRONICS CORPORATION

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NAHOMI OHTA NEC CORPORATION, Assignor RENESAS ELECTRONICS CORPORATION, Assignor NEC ELECTRONICS CORPORATION, Assignor

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CLEANING/DRYING STATION AND PRODUCTION LINE FOR SEMICONDUCTOR DEVICES

09/280,702 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed March 30, 1999

Examiner FRANKIE L STINSON

Class 134

Art Group 1746

Patent No. 6,336,463

Case Type Utility - 134/061000

Status Patented Case

Child 10-085815

Last Updated: 1 year, 11 months ago

Date	#	Transaction
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CLEANING/DRYING STATION AND PRODUCTION LINE FOR SEMICONDUCTOR DEVICES

09/280,702 | U.S. Patent Application

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