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SEMICONDUCTOR PROCESSING METHODS OF TRANSFERRING PATTERNS FROM PATTERNED PHOTORESISTS TO MATERIALS, AND STRUCTURES COMPRISING SILICON NITRIDE

09/488,947 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Jan. 18, 2000

Examiner MARY A WILCZEWSKI

Class 438

Art Group 2822

Patent No. 6,440,860

Case Type Utility - 438/703000

Status Patented Case

Child 09/951,153 Patented

Child 10/160,705 Patented

Child 10/160,698 Patented

Child 10/161,136 Patented

Child 10/161,134 Patented

Child 11/649,423 Abandoned

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Last Updated: 4 years, 11 months ago

Date	#	Transaction
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SEMICONDUCTOR PROCESSING METHODS OF TRANSFERRING PATTERNS FROM PATTERNED PHOTORESISTS TO MATERIALS, AND STRUCTURES COMPRISING SILICON NITRIDE

09/488,947 | U.S. Patent Application

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