Download Docs
Export

ADJUSTABLE WAFER STAGE, AND A METHOD AND SYSTEM FOR PERFORMING PROCESS OPERATIONS USING SAME

10/10,463 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 8, 2001
Examiner WILLIAM A POWELL
Class 438
Art Group 1765
Patent No. 6,660,651
Case Type Utility - 438/729000
Status Patented Case
Last Updated: 4 years, 5 months ago
Date # Transaction