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METHOD AND APPARATUS FOR FAULT DETECTION OF A PROCESSING TOOL AND CONTROL THEREOF USING AN ADVANCED PROCESS CONTROL (APC) FRAMEWORK

09/629,073 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 31, 2000
Examiner ANNE L DAMIANO
Class 714
Art Group 2114
Patent No. 6,725,402
Case Type Utility - 714/004000
Status Patented Case
Child PCT/US01/21159 Published
Last Updated: 4 years, 10 months ago
Date # Transaction