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Inventors

Sadao Hirae Masanobu Sato Shuichi Yasuda

Assignee

SCREEN HOLDINGS CO., LTD.

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DAINIPPON SCREEN MFG. CO., LTD., Assignor

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CLEANING NOZZLE AND SUBSTRATE CLEANING APPARATUS

09/976,134 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Oct. 11, 2001

Examiner ROBIN OCTAVIA EVANS

Class 239

Art Group 3752

Patent No. 6,729,561

Case Type Utility - 239/418000

Status Patented Case

Child 2000-160512 (P)

Last Updated: 4 years, 6 months ago

Date	#	Transaction
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CLEANING NOZZLE AND SUBSTRATE CLEANING APPARATUS

09/976,134 | U.S. Patent Application

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