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METHOD AND APPARATUS FOR FILTERING METROLOGY DATA BASED ON COLLECTION PURPOSE

10/427,620 | U.S. Patent Application

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Location ELECTRONIC
Filed May 1, 2003
Examiner CARLOS R ORTIZ RODRIGUEZ
Class 700
Art Group 2125
Patent No. 6,836,691
Case Type Utility - 700/108000
Status Patented Case
Last Updated: 4 years, 1 month ago
Date # Transaction