Download Docs
Export

CONCURRENT MEASUREMENT OF CRITICAL DIMENSION AND OVERLAY IN SEMICONDUCTOR MANUFACTURING

10/379,738 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location ELECTRONIC
Filed March 5, 2003
Examiner SUN J LIN
Class 716
Art Group 2825
Patent No. 7,080,330
Case Type Utility - 716/004000
Status Patented Case
Last Updated: 4 years, 9 months ago
Date # Transaction