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Click below for detailed party information:

Inventor

Victor M. Benveniste

Assignee

SILICON VALLEY BANK

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AXCELIS TECHNOLOGIES, INC., Assignor SEN CORPORATION, Assignor

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MULTICHANNEL ION GUN

11/74,434 | U.S. Patent Application

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Location ELECTRONIC

Filed March 8, 2005

Examiner ANDREW P SMYTH

Class 250

Art Group 2881

Patent No. 7,598,505

Case Type Utility - 250/492210

Status Patented Case

Last Updated: 4 years, 6 months ago

Date	#	Transaction
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MULTICHANNEL ION GUN

11/74,434 | U.S. Patent Application

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