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David Hetzer Mark H. Somervell Lior Huli

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Tokyo Electron Limited

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TOKYO ELECTRON LIMITED

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TRACK PROCESSING TO REMOVE ORGANIC FILMS IN DIRECTED SELF-ASSEMBLY CHEMO-EPITAXY APPLICATIONS

14/208,160 | U.S. Patent Application

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Location ELECTRONIC

Filed March 13, 2014

Examiner BRITTANY L RAYMOND

Class 430

Art Group 1722

Patent No. 8,975,009

Case Type Utility - 430/329000

Status Patented Case

Parent 61/783,490 Expired

Child PCT/US14/27016 Published

Last Updated: 4 years, 6 months ago

Date	#	Transaction
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TRACK PROCESSING TO REMOVE ORGANIC FILMS IN DIRECTED SELF-ASSEMBLY CHEMO-EPITAXY APPLICATIONS

14/208,160 | U.S. Patent Application

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