Download Docs
Export

SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER

13/323,520 | U.S. Patent Application

Interested in this case?

Request a Demo Track this case, and find millions of cases like it, let us show you how.
Location ELECTRONIC
Filed Dec. 12, 2011
Examiner MESFIN T ASFAW
Class 355
Art Group 2882
Patent No. 9,423,699
Case Type Utility - 355/053000
Status Patented Case
Parent 61/422,918 Expired
Child 15/233,775 Patented
Child 15/587,086 Patented
Child 15/994,492 Patented
Child 16/376,673 Patented
Child 17/313,054 Pending
Last Updated: 1 year, 10 months ago
Date # Transaction