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2157 Exhibit: Exhibit 2157 Declaration of Michael C Newman in Support of PHV

Document IPR2016-00691, No. 2157-2 Exhibit - Exhibit 2157 Declaration of Michael C Newman in Support of PHV (P.T.A.B. Sep. 13, 2016)

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1030 Exhibit: Prosecution History of US Patent No 8,928,119 Response to Office A...

Document IPR2016-00691, No. 1030 Exhibit - Prosecution History of US Patent No 8,928,119 Response to Office Action 09042012 (P.T.A.B. Feb. 29, 2016)

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1039 Exhibit: Concept One CVD System Process Specifications from Novellus

Document IPR2016-00691, No. 1039 Exhibit - Concept One CVD System Process Specifications from Novellus (P.T.A.B. Feb. 29, 2016)

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2160 Exhibit: SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS...

Document IPR2016-00691, No. 2160-10 Exhibit - SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS MJ Dean, et al eds, 1997 (P.T.A.B. Nov. 30, 2016)

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1044 Exhibit: Hass et al, Physics of Thin Films

Document IPR2016-00691, No. 1044 Exhibit - Hass et al, Physics of Thin Films (P.T.A.B. Feb. 29, 2016)

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1054 Exhibit: Akasaka, Y, Three Dimensional IC Trends

Document IPR2016-00691, No. 1054 Exhibit - Akasaka, Y, Three Dimensional IC Trends (P.T.A.B. Feb. 29, 2016)

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1016 Exhibit: Lim et al, The Impact of Wafer Back Surface Finish

Document IPR2016-00691, No. 1016 Exhibit - Lim et al, The Impact of Wafer Back Surface Finish (P.T.A.B. Feb. 29, 2016)

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1003 Exhibit: Curriculum Vitae of Dr Paul D Franzon

Document IPR2016-00691, No. 1003 Exhibit - Curriculum Vitae of Dr Paul D Franzon (P.T.A.B. Feb. 29, 2016)

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1040 Exhibit: Wolf et al, Processing for the VLSI Era

Document IPR2016-00691, No. 1040 Exhibit - Wolf et al, Processing for the VLSI Era (P.T.A.B. Feb. 29, 2016)

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1086 Exhibit: US Patent No 8,907,499

Document IPR2016-00691, No. 1086-29 Exhibit - US Patent No 8,907,499 (P.T.A.B. Mar. 2, 2017)

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1081 Exhibit: Glew Thesis

Document IPR2016-00691, No. 1081-24 Exhibit - Glew Thesis (P.T.A.B. Mar. 2, 2017)

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1085 Exhibit: Milton Ohring, The Materials Science of Thin Films

Document IPR2016-00691, No. 1085-28 Exhibit - Milton Ohring, The Materials Science of Thin Films (P.T.A.B. Mar. 2, 2017)

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1047 Exhibit: US Patent No 4,948,482

Document IPR2016-00691, No. 1047 Exhibit - US Patent No 4,948,482 (P.T.A.B. Feb. 29, 2016)

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1031 Exhibit: Prosecution History of US Patent No 8,928,119 Appeal Brief 0603201...

Document IPR2016-00691, No. 1031 Exhibit - Prosecution History of US Patent No 8,928,119 Appeal Brief 06032013 (P.T.A.B. Feb. 29, 2016)

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1025 Exhibit: Prosecution History of US Patent No 5,915,167 Response to Office A...

Document IPR2016-00691, No. 1025 Exhibit - Prosecution History of US Patent No 5,915,167 Response to Office Action 09081998 (P.T.A.B. Feb. 29, 2016)

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