Filed Oct. 30, 2018

Serial No. 79255326

Registered Jan. 19, 2021

Registration No. 6,247,940

Class Machines for processing semiconductors, solar cells, fibers and other substrates; machines for etching semiconductor surfaces; Machines for coating semiconductors surfaces, namely, evaporation machines, chemical vapor deposition (CVD) machines, Plasma enhanced machines under vacuum or atmospheric pressure; machinery for atmospheric, subatmospheric and under a predefined gas atmosphere transport, namely, machines for loading substrates into the aforementioned equipment by belt, string and paddle transport, namely, belt conveyors, belt pulleys being parts of machines, and pneumatic transporters; radiation-based rapid heating systems consisting of machines and plasma-based machines and their combination, namely, machines for thermal processing of surfaces and substrates; machines for atomic layer deposition (ALD); electric heated installations and equipment for thermal processing or manufacturing processes for semiconductor substrates, namely, coating, oxidation and annealing systems consisting of vacuum soldering machines and chemical vapor deposition (CVD) machines; 013; 019; 021; 023; 031; 034; 035; 021; 023; 026; 036; 038; 013; 021; 023; 024; 031; 034; 100; 103; 106

Case Type Trademark Service mark