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99590134 | Trademark citeCite Docket

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Filed Jan. 12, 2026
Serial No. 99590134
Examining Attorney ANDREW W CROWDER-SCHAEFER
Class Wireless wafers being sensors for measuring physical conditions in the nature of temperature, pressure, vibration, humidity, gas concentration, and electromagnetic properties within semiconductor processing equipment or environments where wafer-like objects are spun, carried, chucked, or handled by the semiconductor processing equipment; Electronic sensors embedded in wafer-like substrates for monitoring operational parameters of semiconductor processing tools, namely, thermal temperature, mechanical, and environmental conditions; silicon data acquisition wafers featuring wireless communication modules for transmitting measurement data from semiconductor processing environments to external monitoring systems; 021; 023; 026; 036; 038
ELG
Case Type Trademark
Status An Office action suspending further action on the application has been sent (issued) to the applicant. To view all documents in this file, click on the Trademark Document Retrieval link at the top of this page.
Last Updated: 1 day, 7 hours ago
Filing Date # Docket Text
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