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Petitioner

Carl Zeiss SMT GmbH

Patent Owner

NIKON CORPORATION

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Carl Zeiss SMT GmbH v. NIKON CORPORATION

IPR2013-00363 | Patent Trial and Appeal Board

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Filed June 17, 2013

Judges Howard Blankenship, Matthew Clements, and Sally Medley

Case Type Inter Partes Review

Status Final Written Decision

Challenged Patent 11/266,288

Patent No. 7,348,575 assignments

Tech Center 2800

Inventors Yasuhiro Omura

Last Updated: 1 year, 9 months ago

Filing Date	#	Filing and Exhibits
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Carl Zeiss SMT GmbH v. NIKON CORPORATION

IPR2013-00363 | Patent Trial and Appeal Board

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