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DOCKET NO.: 0107945.00246US24
`Filed By: Donald R. Steinberg, Reg. No. 37,241
`
`
`David L. Cavanaugh, Reg. No. 36,476
`Michael H. Smith, Reg. No. 71,190
`60 State Street
`Boston, Massachusetts 02109
`Tel: (617) 526-6000
`Email: Don.Steinberg@wilmerhale.com
`
` David.Cavanaugh@wilmerhale.com
` MichaelH.Smith@wilmerhale.com
`
`
`
`
`
`
`
`
`
`
`
`UNITED STATES PATENT AND TRADEMARK OFFICE
`____________________________________________
`
`
`
`BEFORE THE PATENT TRIAL AND APPEAL BOARD
`____________________________________________
`
`
`
`ASML NETHERLANDS B.V., ASML US INC., EXCELITAS TECHNOLOGIES CORP.,
`AND QIOPTIQ PHOTONICS GMBH & CO. KG,
`Petitioners
`
`v.
`
`ENERGETIQ TECHNOLOGY, INC.,
`Patent Owner.
`
`Case IPR2016-00688
`
`
`JOINT MOTION TO TERMINATE PROCEEDING
` PURSUANT TO 35 U.S.C. § 317 AND 37 C.F.R. § 42.72 AND
`JOINT REQUEST TO KEEP PAPER SEPARATE
`AS BUSINESS CONFIDENTIAL INFORMATION
`
`
`
`
`

`
`Pursuant to 35 U.S.C. §317 and 37 C.F.R. § 42.72, Patent Owner Energetiq
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`
`
`Technology, Inc. (“Patent Owner”) and Petitioners ASML Netherlands B.V.,
`
`ASML US, Inc., Excelitas Technologies Corp., and Qioptiq Photonics GmbH &
`
`Co. KG (“Petitioners”) (collectively, “the Parties”) jointly request termination of
`
`Inter Partes Review No. IPR2016-00688, involving claims 4, 5, 6, 8, and 26 of
`
`U.S. Patent 8,969,841.
`
`The Parties have settled all of their disputes involving the following patents
`
`U.S. Patents Nos. 7,435,982 (“the ’982 patent”); 7,786,455 (“the ’455 patent”);
`
`8,309,943 (“the ’943 patent”); 8,525,138 (“the ’138 patent”); 8,969,841 (“the ’841
`
`patent”); 9,048,000 (“the ’000 patent”); and 9,185,786 (“the ’786 patent”). More
`
`specifically, the Parties have agreed to settle and dismiss their related district court
`
`litigation (Energetiq Tech., Inc. v. ASML Netherlands B.V., No. 1:15-cv-10240-
`
`LTS (D. Mass.)) and International Trade Commission litigation (In the Matter of
`
`Certain Laser-Driven Light Sources, Subsystems Containing Laser-Driven Light
`
`Sources, and Products Containing Same, Inv. 337-TA-983 (U.S. International
`
`Trade Commission)). The Parties have also agreed to jointly request termination
`
`of this proceeding and all IPRs filed by Petitioners for the above listed patents1.
`
`
`1 The Parties are submitting a Joint Motion to Terminate Proceeding in each of the
`
`IPRs filed by Petitioners in the above identified patents.
`
`
`
`- 1 -
`
`

`
`Energetiq patent
`7,435,982
`
`7,786,455
`
`8,309,943
`
`8,525,138
`
`8,969,841
`
`9,048,000
`
`9,185,786
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`IPRs relating to patent
`IPR2015-01300 & -01303
`IPR2015-01377
`IPR2016-00583
`IPR2016-00584
`IPR2016-00585
`IPR2015-01279
`IPR2016-00570
`IPR2016-00575
`IPR2016-00576
`IPR2016-00578
`IPR2016-00579
`IPR2015-01277
`IPR2016-00554
`IPR2016-00555
`IPR2016-00556
`IPR2015-01368
`IPR2016-00565
`IPR2016-00566
`IPR2015-01362
`IPR2016-00127
`IPR2016-00688
`IPR2016-00689
`IPR2015-01375
`IPR2016-00126
`IPR2016-00774
`IPR2016-00775
`IPR2016-00771
`IPR2016-00776
`
`Pursuant to 37 C.F.R. § 42.74(b), the Parties’ settlement agreement and any
`
`
`
`collateral agreements made in contemplation of termination of the proceeding are
`
`in writing, and true and correct copies of such documents are being filed herewith
`
`
`
`- 2 -
`
`

`
`as Exhibit 1235. No other such agreements, written or oral, exist between or
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`among the parties.
`
`The Parties hereby jointly request that the settlement related agreement be
`
`treated as business confidential information and be kept separate from the files of
`
`the above captioned IPR pursuant to 35 U.S.C. § 317(b) and 37 C.F.R. § 42.74(c).
`
`I.
`
`Background
`
`Petitioners filed several requests for Inter Partes Review of the above
`
`identified patents. The Board has instituted Inter Partes Review on all challenged
`
`claims of the first ten IPRs Petitioners filed, and has not issued a decision on
`
`institution regarding the remaining IPRs. Specifically, a trial was instituted in the
`
`following IPRs:
`
`Energetiq patent
`7,435,982
`
`7,786,455
`8,309,943
`8,525,138
`8,969,841
`
`9,048,000
`
`
`
`IPRs relating to patent
`IPR2015-01300 & -01303
`IPR2015-01377
`IPR2015-01279
`IPR2015-01277
`IPR2015-01368
`IPR2015-01362
`IPR2016-00127
`IPR2015-01375
`IPR2016-00126
`
`Decisions on institution have not yet been ordered for the following IPRs:
`
`Energetiq patent
`7,435,982
`
`IPRs relating to patent
`IPR2016-00583
`IPR2016-00584
`
`
`
`- 3 -
`
`

`
`7,786,455
`
`8,309,943
`
`8,525,138
`
`8,969,841
`
`9,048,000
`
`9,185,786
`
`
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`IPR2016-00585
`IPR2016-00570
`IPR2016-00575
`IPR2016-00576
`IPR2016-00578
`IPR2016-00579
`IPR2016-00554
`IPR2016-00555
`IPR2016-00556
`IPR2016-00565
`IPR2016-00566
`IPR2016-00688
`IPR2016-00689
`IPR2016-00774
`IPR2016-00775
`IPR2016-00771
`IPR2016-00776
`
`On May 5, 2016, the Parties agreed to settle all of their disputes involving
`
`U.S. Patent Nos. 7,435,982; 7,786,455; 8,309,943; 8,525,138; 8,969,841;
`
`9,048,000; and 9,185,786, including all litigation and Patent Office proceedings
`
`related thereto.
`
`On May 25, 2016, the Parties informed the Board of the settlement and
`
`requested authorization to file a joint motion to terminate the proceeding with
`
`respect to both the Patent Owner and the Petitioners. In a conference call with the
`
`Board on May 31, 2016, the Parties confirmed that settlement had been reached
`
`and the Board authorized the filing, on or before June 14, 2016, of the requested
`
`joint motion to terminate this proceeding as to both parties. The Board additionally
`
`
`
`- 4 -
`
`

`
`authorized the parties to include with the joint motion to terminate a request to
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`treat the settlement as business confidential information.
`
`II. Termination as to Patent Owner and Petitioners Is Appropriate
`
`
`
`Termination of this IPR is appropriate as the Board has not yet “decided the
`
`merits of the proceeding” on the proceedings noted above. See, e.g., Office Patent
`
`Trial Practice Guide, 77 Fed. Reg. 48756, 48768 (Aug. 14, 2012). For those IPRs
`
`which have been instituted, no Petitioner replies have been filed, and in two of
`
`these cases, no Patent Owner responses have been filed.
`
`
`
`Notably, no dispute remains between the Patent Owner and the Petitioners
`
`involving U.S. Patent Nos. 7,435,982; 7,786,455; 8,309,943; 8,525,138; 8,969,841;
`
`9,048,000; and 9,185,786:
`
`i.
`
`the Parties have agreed to jointly request termination of all of the
`
`IPRs Petitioners filed concerning U.S. Patent Nos. 7,435,982;
`
`7,786,455; 8,309,943; 8,525,138; 8,969,841; 9,048,000; and
`
`9,185,786; and,
`
`ii.
`
`the litigation between the Parties involving the same patents has
`
`been dismissed as part of the settlement.
`
`III. Status of Related Litigation
`
`
`
`As noted above, the related district court and ITC actions between Patent
`
`Owner and Petitioners have been settled and dismissed.
`
`
`
`- 5 -
`
`

`
`IV. Treat Settlement Agreement as Business Confidential Information
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`
`
`Patent Owner and Petitioners hereby request that the settlement agreement
`
`(including any related attachments) filed herewith as Exhibit 1235 be treated as
`
`business confidential information, be kept separate from the file of the above
`
`captioned IPR, and be made available only to Federal Government agencies on
`
`written request, or to any person on a showing of good cause pursuant to 35 U.S.C.
`
`§ 317(b) and 37 C.F.R. § 42.74(c). In view of that request the settlement
`
`agreement has been filed for access by the “Parties and Board Only.”
`
`
`
`
`
`
`
`- 6 -
`
`

`
`
`
`V. Conclusion
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`
`
`For the foregoing reasons, Patent Owner and Petitioners jointly request that
`
`the Board terminate this Inter Partes Review proceeding as to both Parties, and
`
`treat the settlement related agreement filed herewith as business confidential
`
`information and keep that agreement separate from the file of the above captioned
`
`Respectfully submitted,
`
`By /Donald R Steinberg/
`Donald R. Steinberg
`Registration No. 37,241
`
`Counsel for Petitioners
`
`
`
`By / Joseph A. Capraro Jr. /
`Joseph A. Capraro Jr.
`Registration No. 36,471
`
`Counsel for Patent Owner
`
`
`- 7 -
`
`IPR.
`
`
`
`Dated: June 3, 2016
`
`
`
`
`
`
`
`
`
`
`
`
`
`
`

`
`CERTIFICATE OF SERVICE UNDER 37 C.F.R. § 42.6 (e)(4)
`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`I hereby certify that, on June 6, 2016, I caused a true and correct copy of the
`
`foregoing documents:
`
` Joint Motion to Terminate Proceeding Pursuant to 35 U.S.C. § 317 and 37
`
`C.F.R. § 42.72 and Joint Request to Keep Paper Separate as Business
`
`Confidential Information
`
` Exhibit 1235: Settlement Agreement (contains confidential business
`
`information), submitted as Parties and Board Only under the provisions of
`
`35 U.S.C. § 317(b) and 37 C.F.R. § 42.74(c)
`
` Petitioners’ Updated Exhibit List
`
`to be served via electronic mail upon the address:
`
`
`
`
`
`
`
`
`
`
`
`
`PTABMattersBoston@proskauer.com
`
`
`
`
`
`
`
`
`
`
`__/Michael Smith/_
`Michael H. Smith
`Registration No. 71,190
`
`i
`
`
`
`
`
`
`
`
`
`

`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`PETITIONERS’ UPDATED LIST OF EXHIBITS FOR
`IPR2016-00688
`
`
`
`Exhibit
`
`Description
`
`1201
`
`1202
`
`1203
`
`1204
`
`1205
`
`1206
`
`1207
`
`1208
`
`1209
`
`1210
`
`1211
`
`1212
`
`U.S. Patent No. 8,969,841
`
`Chart of Patent Family Members
`
`Declaration of J. Gary Eden, Ph.D. Regarding U.S. Patent No.
`8,969,841, Claims 4-6, 8 and 26 (“Eden Decl.”)
`
`French Patent Publication No. FR2554302A1, published May 3,
`1985 with English Translation and affidavit of translation (“Gärtner”)
`
`Japanese Patent Publication No. 2006010675A, published January
`12, 2006 with English Translation and affidavit of translation
`(“Kensuke”)
`
`William T. Silfvast, Laser Fundamentals, 2d ed., pp. 1-6; 199-222;
`565-68 (2004).
`
`Energetiq EQ-10M Soft X-Ray & EUV Source Data Sheet (2005)
`
`Office Action dated November 12, 2014
`
`Applicant’s Amendment and Response dated December 17, 2014
`
`Notice of Allowability dated January 22, 2015
`
`U.S. Patent Publication No. US2008/0055712 (“Noelscher”)
`
` A.C. Tam, “Quasiresonant laser-produced plasma: An efficient
`mechanism for localized breakdown”, J. Appl. Phys., Vol. 51, No. 9,
`4682-87 (1980) (“Tam”)
`
`1213
`
` Summary of Inter Partes Reviews for Related Patents
`
`1214
`
`International Publication WO-2004097520, published November 11,
`2004 (“Mourou”)
`
`
`
`i
`
`

`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`Exhibit
`
`Description
`
`1215
`
`U.S. Patent No. 4,780,608 to Cross
`
`1216
`
`1217
`
`Handbook of Laser Technology and Applications, Vol. III:
`Applications (Colin E. Webb et al., eds.), Chapter D1.2, pp. 1587-
`1611 (2004) (“Handbook of Laser Tech.”)
`
`D. Keefer, “Laser-Sustained Plasmas,” Chapter 4, in Radziemski et
`al., Laser-Induced Plasmas and Applications, pp. 169-206, CRC
`Press (1989)(“Keefer”)
`
`1218
`
`U.S. Patent No. 6,541,924 to Kane et al.
`
`1219
`
`1220
`
`1221
`
`1222
`
`Response to Non-Final Office Action, U.S. Patent Application No.
`13/024,027
`
`U.S. Patent No. 7,786,455
`
`U.S. Patent No. 7,435,982
`
`Michel Digonnet, Rare Earth-Doped Fiber Lasers and Amplifiers, 2d
`ed. (2001), pp. 144-170.
`
`1223
`
`Kelin Kuhn, Laser Engineering, (1998), Chapter 12, pp. 344-440.
`
`1224
`
`1225
`
`1226
`
`1227
`
`A. A. Ballman et al., “Synthetic Quartz with High Ultraviolet
`Transmission,” Applied Optics, Vol. 7, No. 7 (1968) (“Ballman”)
`
`M. Beterov, Resonance radiation plasma (photoresonance plasma),
`Sov. Phys. Usp. 31 (6) (“Beterov”)
`
`Bussiahn, “Experimental and theoretical investigations of a low-
`pressure He-Xe discharge for lighting purpose,” J. Appl. Phys. 95(9)
`(May 1, 2004) (“Bussiahn”)
`
`V. P. Zimakov et al., “Interaction of Near-IR Laser Radiation with
`Plasma of a Continuous Optical Discharge”, Plasma Physics Reports,
`Vol. 42, No. 1, 68-73 (2016) (“Zimakov”) (produced by Patent
`Owner as Exhibit 2013 in IPR2015-01362)
`
`
`
`ii
`
`

`
`Patent No. 8,969,841
`IPR2016-00688
`
`
`Description
`
`Y. Jeong et al., “Ytterbium-doped large-core fibre laser with 1 kW of
`continuous-wave output power”, Electron. Lett. 40 (2004) (“Jeong”)
`
`H.M. Pask et al., “Ytterbium-Doped Silica Fiber Lasers: Versatile
`Sources for the 1-1.2 pm Region”, IEEE J. Selected Topics in
`Quantum Electronics, vol. 1, pp. 2-13 (1995) (“Pask”)
`
`Exhibit
`
`1228
`
`1229
`
`1230
`
`U.S. Patent No. 6,972,421 (“Melnychuk”)
`
`1231
`
`1232
`
`1233
`
`1234
`
`1235
`
`L. Klein, “Measurements of Spectral Emission and Absorption of a
`High Pressure Xenon Arc in the Stationary and the Flashed Modes”,
`Applied Optics, Vol. 7, No. 4, 677-85 (1968) (“Klein”)
`
`Oxford Dictionary of Astronomy, Rev. Ed. 2003, definition of
`“bound-bound transition” (“Oxford Dictionary of Astronomy”)
`
`A.V. Eletskii et al., “Formation kinetics and parameters of a
`photoresonant plasma”, Sov. Phys. JETP, Vol. 67, No. 5, 920-24
`(1988) (“Eletskii”)
`
`R.M. Measures et al., “Laser interaction based on resonance
`saturation (LIBORS): an alternative to inverse bremsstrahlung for
`coupling laser energy into a plasma”, Applied Optics, Vol. 18, No.
`11, 1824-27 (1979) (“Measures”)
`
`Settlement Agreement (contains confidential business information),
`submitted as Parties and Board Only under the provisions of 35
`U.S.C. § 317(b) and 37 C.F.R. § 42.74(c)
`
`
`
`iii

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