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METHOD FOR REDUCED PITCH LITHOGRAPHY

08/361,595 | U.S. Patent Application

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Location
Filed Dec. 22, 1994
Examiner KATHLEEN DUDA
Class 430
Art Group 1113
Case Type Utility - 430/311000
Status Abandoned -- File-Wrapper-Continuation Parent Application
Child 08/510,717 Abandoned
Child 08/740,145 Patented
Child 08/740,014 Patented
Last Updated: 4 years, 9 months ago
Date # Transaction