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METHOD FOR REDUCED PITCH LITHOGRAPHY

08/510,717 | U.S. Patent Application

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Location
Filed Aug. 3, 1995
Examiner KATHLEEN DUDA
Class 430
Art Group 1113
Case Type Utility - 430/311000
Status Abandoned -- File-Wrapper-Continuation Parent Application
Parent 08/361,595 Abandoned
Child 08/740,014 Patented
Last Updated: 4 years, 4 months ago
Date # Transaction