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METHOD FOR REDUCED PITCH LITHOGRAPHY

08/740,145 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Oct. 22, 1996
Examiner KATHLEEN DUDA
Class 430
Art Group 1722
Patent No. 5,652,084
Case Type Utility - 430/315000
Status Patented Case
Parent 08/361,595 Abandoned
Last Updated: 4 years, 5 months ago
Date # Transaction